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PROCESS KITS

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PROCESS KIT A

CODE: 200600

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In stock
0200-09603 PIPE,INSULATING,QTZ,ESC 1 0020-30347 CYLINDER,EXTERNAL 1 0020-31488 GAS DISTRIBUTION PLATE,13 HOLES 1 0020-31628 WSHR,INSULATING,ESC 1... More
PROCESS KIT B

CODE: 200601

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In stock
0020-31488 GAS DISTRIBUTION PLATE 13 HOLES 1 0020-31628 WSHR,INSULATING,ESC 1 0020-34748 CYLINDER,EXTERNAL,LOWERED CATHODE 1 0020-34749... More
PROCESS KIT C

CODE: 200602

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In stock
0020-30347 CYLINDER,EXTERNAL 1 0020-31492 GAS DISTRIBUTION PLATE 101 HOLES 1 0020-31628 WSHR,INSULATING,ESC 1 0020-31632 CARRIER,ESC 1 0021-10019... More
PROCESS KIT D

CODE: 200603

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In stock
0020-38753 LIFT PIN,CONDUCTIVE,SIMP. CATHODE 4 0021-09835 LINER POLY,MXP PLUS,1/4 THICK 1 0021-09957MH FOCUS RING BASE(QUARZGLAS)NOTCH 1 0200-10027... More
PROCESS KIT E

CODE: 200604

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In stock
0020-30347 CYLINDER,EXTERNAL 1 0020-31628 WSHR,INSULATING,ESC 1 0020-31632 CARRIER,ESC 1 0020-34015 GAS DISTRIBUTION PLATE 101 HOLES ON 8.5" 1 0030-09085... More
PROCESS KIT F

CODE: 200605

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In stock
0020-09031 INSULATING WASHER 1 0020-09911 CARRIER,SPUTTER 1 0020-10518 PEDESTAL THICK 200MM GRAPHITE/QUARTZ 1 0020-10527 SPUTTER PIPE 1 0020-30347... More
PROCESS KIT G

CODE: 200606

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In stock
3700-01425 ORING ID 14.984 CSD .139 KALREZ 407975D 1 3700-01687 ORIND ID 5.609 CSD 139 CZ SC520 90 DUROWHI 1 0010-03175ER SUSCEPTOR ASSY TEOS 200MM 1... More
PROCESS KIT H

CODE: 200607

Out-of-stock
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0010-09464 SUSCEPTOR ASSY NITRIDE 200MM 0020-10123 PLATE PERF NI 200MM 0020-10185 SUPPORT HOOP 200MM 0020-10192 RING WAFER LIFT 200MM 0020-10402 PUMPING... More
PROCESS KIT I

CODE: 200608

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In stock
0020-30347 CYLINDER,EXTERNAL 1 0020-30855 PLUS GAS DIST PLATE OX/MLR/NIT 8 0020-31628 WSHR,INSULATING,ESC 1 0020-31632 CARRIER,ESC 1 0020-31642... More
PROCESS KIT J

CODE: 200609

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In stock
0020-30347 CYLINDER,EXTERNAL 1 0020-31492 GAS DISTRIBUTION PLATE 101 HOLES 1 0020-31628 WSHR,INSULATING,ESC 1 0020-31632 CARRIER,ESC 1 0030-09085 BARRIER... More

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